Using oblique angle deposition to fabricate half wave-plate

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 103 === In order to perform as a half waveplate for normal incidence, birefringent Ta2O5 and Indium Tin Oxide (ITO) thin films were grown using bideposition. The pitch length of the bideposited Ta2O5 and ITO thin films are varied their periods from 3.9 nm to 17.1 nm...

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Bibliographic Details
Main Authors: Chien-Hao Tseng, 曾建豪
Other Authors: Yi-Jun Jen
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/4jmc2b