Ellipsometric study on residual stress and opto-electrical properties of AZO and ITO thin films
碩士 === 南臺科技大學 === 機械工程系 === 103 === With the flourishing development of the opto-electrical industry as well as related research, the demand for TCOs thin film has greatly increased. Among them, the ITO films have a large share on the market. AZO is a non-indium material with great potential. Since...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94a5pu |