Fabrication of Linear Optical Scales by Direct Imprint
碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === Nowadays there are two ways, laser writing and photolithography, for manufacturing the main scale of linear optical encoder. Photolithography requires expensive mask and cannot fabricate ultra-long scale. The speed of laser direct writing is too slow for mass pr...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07881042615989251633 |