Development of a warpage measurement technique by using stroboscopic moiré method
碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === In this study, an innovative stroboscopic moiré measurement technique (SMMT) for real-time warpage measurement in the process of metal organic chemical-vapor deposition (MOCVD) is developed. The proposed SMMT is developed by combining the design concepts of stro...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wd2bu3 |