Micro Additive Manufacturing System of Large-area Microstructure Exposure Research

碩士 === 國立臺灣科技大學 === 機械工程系 === 103 === This research’s purpose is using maskless lithography with additive manufacturing system – photo forming fabrication technology, the system is under-illuminated type of exposure machine can fabricate big-area microstructure. Compared to microscope lithography sy...

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Bibliographic Details
Main Authors: Po-Hsiang Su, 蘇柏向
Other Authors: Jeng-Ywan Jeng
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/82305544199862337497