The fabrication of pH sensor based on nanodiamond and silicon nanowires
碩士 === 國立臺灣科技大學 === 光電工程研究所 === 103 === In this study, pH sensors were first fabricated by nanodiamond films(NDFs) synthesized by the MPCVD system with different ratio of Ar, N2, CH4, H2 gas flow. Oxygen plasma treatment was used for modifying the diamond film quality for pH sensitivity studies. In...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36184455938773926892 |