Studies of Low-Energy Laser Annealing to Improve the Retention of Au Nanocrystal Memory & Primary Beam Exposure to Reduce the Proximity Effect in eBeam Lithography
博士 === 國立臺灣大學 === 電子工程學研究所 === 103 === First Part: Study of Low Energy Laser Annealing to Improve Au Nanocrystal Memory. The low-energy multipulse excimer laser annealing (LEM-ELA) is proposed to anneal the nanostructure of Au nanocrystal (NC) embedded in SiO2 thin film without causing atomic diffus...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64658708203950470999 |