Application of zeolite-like silica nano-particles in anti-corrosion films and in low-k films
碩士 === 國立臺灣大學 === 化學工程學研究所 === 103 === The applications of MFI-like and BEA-like nano-particles in anti-corrosion films and in low-k films were studied. For anti-corrosion application, the particles were added in GPTMS-TEOS (3-glycidoxypropyltrimethoxysilane and tetraethyl orthosilicate) solution to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16389868371653048018 |