Low-Cost and Flexible Atmospheric Pressure Microplasma Devices and Applications on Maskless Surface Patterning
博士 === 國立臺灣大學 === 化學工程學研究所 === 103 === A lot of efforts have been made on atmospheric microplasma systems since such type of plasma systems does not need vacuum systems, and has unique properties such as high electron density, high power density, and being able to create highly reactive environment...
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| Format: | Others |
| Language: | zh-TW |
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2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83643225698878331372 |