Use Data Envelopment Analysis to Evaluate and Optimize Implant Tool Tune Beam Efficiency in Semiconductor Fab
碩士 === 國立清華大學 === 經營管理碩士在職專班 === 103 === The current mainstream of semiconductor manufacturing uses silicon wafer as a fundamental material with the needed electronic components build on the surface by several hundred steps of integrated circuits manufacturing process include wafer oxide layer growt...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52by27 |