Optimization and analysis of silicon thin-film for SPA solar cell by ICPCVD
碩士 === 國立清華大學 === 電子工程研究所 === 103 === In this research work, we fabricated a-Si:H and poly-Si thin-films by using inductively coupled plasma enhanced chemical vapor deposition system with low inductance antenna. The a-Si:H and poly-Si thin-films have different band gaps for absorber layers to get th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23124007014893659693 |