Design and Fabrication of Tunable MEMS-Based Fabry-Pérot Filter in Near-Infrared Wavelength Range
碩士 === 國立清華大學 === 電子工程研究所 === 103 === The Fabry-Pérot filter (FPF) fabricated by the technology of micro-opto-electro-mechanical system (MOEMS) provides several advantages such as miniaturization and multiplicity. Devices can be scaled down by the development of miniaturization with the improvement...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/79825900281632232578 |