Advanced Layout Design Techniques
博士 === 國立清華大學 === 資訊工程學系 === 103 === This dissertation studies four problems of advanced layout design in two different aspects. For engineering change order (ECO), we focus on redundant-via-aware ECO routing and mask-cost-aware ECO routing; for triple patterning lithography (TPL), we first investig...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02909403852728368366 |