Study of Tunnel Field-Effect Transistors With Different Poly-Si Crystallization Method
碩士 === 國立中山大學 === 電機工程學系研究所 === 103 === There are three research directions in this thesis to discuss, respectively, including the improvement of poly-silicon crystallization to the device performance, impact of scaling down for conductivity of tunnel transistor, reliability of different channel cry...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/rbp2vg |