The structures of ZnO/Al2O3 superlattices grown by Atomic Layer Deposition
碩士 === 國立中山大學 === 物理學系研究所 === 103 === Attempts were made to grow epitaxial ZnO/AlOx superlattice structures by Atomic Layer Deposition (ALD) at 177˚C on (0001)-oriented sapphire (α-Al2O3) and (100)-oriented Si substrates. In order to systematically search for epitaxial growth conditions, the total n...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/68508018399779480778 |