Intelligent Precise Motion Control System for Three-Axis Piezo-Flexure Stage
博士 === 國立中央大學 === 電機工程學系 === 103 === The objective of this dissertation is to develop a high performance intelligent control system for the PC-based piezo-flexural nanopositioning stage (PFNS) that has widely utilized in the industries for many applications such as high-density semiconductors, scann...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68044422459972117879 |