Fabrication and Characterization of Device of Spin Injection and Detection on Germanium on Insulator
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 103 === In this thesis, we success in using Smart CutTM to fabricate high quality germanium thin film on insulator(GeOI) substrate. We use proton ion implantation following with direct bonding on the glass substrate. And use thermal annealing to cut the thin film f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61887182267536179768 |