Etching Profile Control of Mo/Al Film in TFTLCD Array Process

碩士 === 國立交通大學 === 工學院精密與自動化工程學程 === 103 === The current technology of TFT-LCD manufacturing process for general products is mature. Users are unlikely to see any major price increases in end products. As a result, the current demand for TFT-LCD is moving to high-end products, such as 4K2K and AHVA,...

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Bibliographic Details
Main Authors: Tsao, Lin-Hsiang, 曹琳翔
Other Authors: Cheng, Stone
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/01261772406418678605