Enhancing Ammonia Sensing Ability of Poly-Si Nanowires FETs by Surface Modified Fluorine-containing Functional Groups

碩士 === 國立交通大學 === 光電工程研究所 === 103 === This research is focused on the fluorine atoms containing organic compounds surface modified poly-Si nanowires FETs ammonia gas sensor. Due to the strong hydrogen bonding with ammonia, the sensitivity of fluorine containing organic compounds modified nanowires c...

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Bibliographic Details
Main Authors: Kuo, Wei-Ting, 郭韋廷
Other Authors: Chen, Huang-Ming Philip
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/52428841607408243403