Improvement on the wafer uniformity of CMP process using Designed Experiments - A Case Study of U Company

碩士 === 國立交通大學 === 管理學院工業工程與管理學程 === 103 === Due to the competitively low-priced labor in China, its overcapacity in semiconductor production leads to falling price in the global semiconductor market. Thus, Taiwanese semiconductor manufacturing companies are facing the problem of low profit. They nee...

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Bibliographic Details
Main Authors: Wang,Ying-Chieh, 王盈傑
Other Authors: Tong, Lee-Ing
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/nkk8wa