The studies of pulsed laser deposited Molybdenum disulfide used in field effect transistor
碩士 === 國立暨南國際大學 === 應用材料及光電工程學系 === 103 === We use Pulsed Laser Deposition Thin Film (PLD) and Radio Frequency Plasma Laser Deposition(RF-PLD) to form MoS2 thin film transistor by MoS2target ,observed the characteristic of thin film and electrically . First we buy insulator SiO2 about 300 nm ,which...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/39246078625176583195 |