The studies of pulsed laser deposited Molybdenum disulfide used in field effect transistor

碩士 === 國立暨南國際大學 === 應用材料及光電工程學系 === 103 === We use Pulsed Laser Deposition Thin Film (PLD) and Radio Frequency Plasma Laser Deposition(RF-PLD) to form MoS2 thin film transistor by MoS2target ,observed the characteristic of thin film and electrically . First we buy insulator SiO2 about 300 nm ,which...

Full description

Bibliographic Details
Main Authors: Chia-Cheng Chou, 周珈丞
Other Authors: Vincent K.S. Hsiao
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/39246078625176583195