Application of Nanosphere-related Lithography to fabricate Silicon Nanonet Field-Effect Transistors and Metallic Metamaterials
碩士 === 國立成功大學 === 光電科學與工程學系 === 103 === In this dissertation, we will demonstrate how to fabricate metallic metamaterials and Silicon nanonet Field-Effect Transistors (FETs) using Nanosphere-related lithography techniques. To fabricate metallic metamaterials, we have included techniques such as ang...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76907366889123564221 |