Fabrication of Pattern Sapphire Substrate Based on UV Nanoimprint Lithography with Flexible Stamp
碩士 === 國立成功大學 === 機械工程學系 === 103 === In this thesis, flexible molds and ultraviolet (UV) nanoimprint lithography are applied for fabricating pattern sapphire substrates (PSSs). Due to the deformable and flexible characteristic of the soft stamps, it is possible to achieve a conformable contact with...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/66732021605266987380 |