The Influence of Various Flow Rates on Flow Features in MOCVD Reactor
碩士 === 國立成功大學 === 機械工程學系 === 103 === Presented is an investigation into the influence of various flow rates on flow features within a MOCVD (Metal-Organic Chemical Vapor Deposition) reactor. Two most commonly used reactors designs are introduced, with one of these generally regarded as an aggregate...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72351254068232231845 |