Design of Multi-Sensor Readout Circuit by Using CMOS MEMS Process
博士 === 國立成功大學 === 電機工程學系 === 103 === This dissertation presents the design of low-power low-noise monolithic CMOS MEMS accelerometers using area-efficient digital offset trimming techniques to compensate for process variations caused by sensor capacitance mismatches. The consistent distributions of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59273957360057987911 |