Improving Light Output Power and Photovoltaic Performance of Thin-film Flip-chip InGaN-based Light-emitting Diodes Through KrF Laser Etching and Chemical Etching
碩士 === 國立成功大學 === 微電子工程研究所 === 103 === In this study, an efficient, fast and simple surface texturing process using KrF laser irradiation in conjunction with hot KOH chemical wet etching on the undoped GaN (u-GaN) surface of TFFC-LEDs with a CuW-bonded substrate is demonstrated. The surface rougheni...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/tfnqc4 |