Fabrication of a novel uncooled infrared microbolometer and low-frequency-noise analysis
碩士 === 國立成功大學 === 微電子工程研究所 === 103 === In this work, we propose a unique resonator structure which compatible with Si-based CMOS process to fabricate an amorphous silicon (α-Si) microbolometer for far infrared radiant (FIR) detecting applications. The α-Si is selected as sensing element for its high...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s222vn |