Particle-in-Cell Simulation of Capacitively Coupled Plasma in The Presence of Coulomb Collisions and Secondary Electron Emission
碩士 === 國立成功大學 === 太空與電漿科學研究所 === 103 === A Particle-in-Cell method is built in one-dimensional electrostatic model to study effects of secondary electron emission (SEE) in capacitively coupled plasma (CCP). The model simulate the particles’ behavior in one-dimensional space bounded by two walls. The...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07381484802927714629 |