A Simulation-Optimization Approach for Workstation Number Planning at Semiconductor Wafer Fabrication Systems
碩士 === 國立成功大學 === 土木工程學系 === 103 === The semiconductor manufacturing factory is a very complicated place. In this thesis we develop a simulation- and Genetic Algorithm-based optimization method to systematically solve for an ideal number of workstations deployed for each tool groups. A three-layered...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/22790138373455364636 |