Growth and structural characterization of ZnO nanostructures deposited by atomic layer deposition
碩士 === 中興大學 === 奈米科學研究所 === 103 === ZnO nanostructures were grown on sapphire substrates by atomic layer deposition. To enable ZnO nanostructure formation, two ZnO buffer layer structure was employed prior to the final deposition of ZnO nanostructure at 600℃. In this case, the 1st ZnO buffer layer w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86158889403791898620 |