Performance analysis of a six-axis micro-positioning stage

• Main Authors: Yan-cen Liou, 劉彥岑
• Other Authors: 陳昭亮
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/29732341988977038526

碩士 === 國立中興大學 === 機械工程學系所 === 103 === The theme of this study is analyzing performance of six-axis micro-positioning stage. The structure of positioner is composed of hinge and use six piezoelectric actuators for driving six-axis micro-positioning stage to achieve six-axis positioning. Modal frequency side, measurement of the actual size of the hinge, It derived its theoretical value portion of the motion axis, and compared with finite element analysis and experimental results, in order to verify the correctness of the analysis. Optical measurement system consists of a laser diode, a four-quadrant photoelectric sensors and demodulating modulated signal amplifier consisting, It can measure the displacement of the six axis of the positioner simultaneously. Control experiment side, establish hysteresis model and design PI controller, then with a fast FPGA I / O capture and computing functions can be instantly measured signal feedback, reach positioner positioning control. The procedures of this research are dived into the following four steps: (1) fundamental formulation derivation, (2) modal analysis, (3) control system construction, and (4) experiment verification. From the experimental results. Research objective is theoretical model of this positioner has been re-derived. It is then compared with the finite analysis and experiment results for verification. And analysis the impact hinges on the natural frequency of processing errors. Establish hysteresis model and design PI controller, reducing tracking error hysteresis brought, and the use of traditional modeling and optimization modeling to explore both the elimination of hysteresis effects. Traditional methods to establish hysteresis model, for the circular tracking test, the offset reduce 90.24%, the standard deviation reduce 35.64%, optimization methods to establish hysteresis model, for the circular tracking test the ,offset reduce 94.46%, the standard deviation reduce 83.33%,the closed- loop control, for the circular tracking test, the offset reduce 95.62%, the standard deviation reduce 84.67%.