Performance analysis of a six-axis micro-positioning stage
碩士 === 國立中興大學 === 機械工程學系所 === 103 === The theme of this study is analyzing performance of six-axis micro-positioning stage. The structure of positioner is composed of hinge and use six piezoelectric actuators for driving six-axis micro-positioning stage to achieve six-axis positioning. Modal frequen...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29732341988977038526 |