Effects of different ethane/nitrogen ratios on the properties of thermal chemical vapor deposition carbon thin films
碩士 === 國立中興大學 === 材料科學與工程學系所 === 103 === This study investigates the effects of C2H6/(C2H6+N2) ratios on the properties of carbon films prepared by thermal chemical vapor deposition. The thickness, microstructure, electrical property of carbon films and residual gases in the gas phase were investiga...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97462846080530441011 |