Fabrication and characterization of Ga, F co-doped zinc oxide thin films by radio-frequency magnetron sputtering
碩士 === 國立中興大學 === 光電工程研究所 === 103 === In this study, gallium and fluorine co-doped zinc oxide (GFZO) thin films were deposited on Corning EagleXG glass with RF magnetron sputtering system. We used ZnO targets containing 3wt% Ga2O3, named GZO. Then, we introduced doping gas tetrafluoromethane (CF4) i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12073854773533777694 |