A Simulative Study of the Dependence of Coplanarity on Dummy Area and Aspect Ratio

碩士 === 國立中興大學 === 化學工程學系所 === 103 === With the popularity of mobile devices, the wafers exist ubiquitously in our daily life. Furthermore, the high replacement rate of electronic products enhances the importance of environmentally friendly process. Previous researches related to actual plating was b...

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Bibliographic Details
Main Authors: Chih-Hsiang Liu, 劉智翔
Other Authors: 張厚謙
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/31428962492270837569