A Simulative Study of the Dependence of Coplanarity on Dummy Area and Aspect Ratio
碩士 === 國立中興大學 === 化學工程學系所 === 103 === With the popularity of mobile devices, the wafers exist ubiquitously in our daily life. Furthermore, the high replacement rate of electronic products enhances the importance of environmentally friendly process. Previous researches related to actual plating was b...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/31428962492270837569 |