Electrical performance and micro-loading effect of n-type FinFETs with temperature stress
碩士 === 明新科技大學 === 電子工程系碩士班 === 103 === For the traditional CMOS transistors with planar form, these devices have been applied for a long time in semiconductor industry. Due to the need of the IC marketing, the shrinkage of device feature is a major trend, but the process development also faces lots...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85964889347772986410 |