A method of PID closed-loop control was used for asymmetric bipolar DC pulsed magnetron sputtering system to deposit WO3-Nb2O5 mixed films
碩士 === 明新科技大學 === 電子工程系碩士班 === 103
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hcs6cz |