Sputtering Deposition of ZrWN Films to Enhance Milling Tool Performance
碩士 === 龍華科技大學 === 機械工程系碩士班 === 103 === Hard films own lower friction coefficient, high hardness, higher wear, corrosion resistance and excellent thermal stability, have been widely used to improve tools and machine parts. ZrWN thin films were deposited onto tungsten carbide tools and glass substrate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75295311513456092050 |