The heuristic preemptive dispatching method for Activated Roller Belt - based on material handling system of 450 mm wafer Fabrications
碩士 === 國立高雄應用科技大學 === 製造與管理外國學生碩士專班 === 103 === The 450mm transition is already the real development trend of semiconductor industry. Because the wafer is heavier and larger, the 450mm wafer handling has some challenges. With advantages proved, the conveyor-based on automated material handling syste...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/9539mw |