A novel method for fabrication of microlens array mold and polymer microlens array
碩士 === 國立高雄應用科技大學 === 模具工程系 === 103 === In recent years, many different fabrication technologies have been proposed for fabrication of microlens array mold, including the integration of photo-lithography and electroforming process, Si isotropic wet etching, focused ion beam technology and ultra-prec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23482511417448721393 |