Study of Measurement of Step Height with Dual-wavelength Interferometry
碩士 === 逢甲大學 === 電機工程學系 === 103 === This thesis proposes a dual-wavelength interferometry for measuring the step height profile that is based on Twyman-Green interferometer. In the apparatus, a polarized light passes through Twyman-Green interferometer to form the interferometric pattern. As the wave...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04770906893053018194 |