Development A Massflow Measurement System Based on Flexible Electrical Sensor Array

• Main Author: 王森巨
• Other Authors: 張興政
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/17425256656855026482

碩士 === 逢甲大學 === 自動控制工程學系 === 103 === The research develops PDMS flexible substrate based electrical sensor array manufactured by the photolithography and life-off process of the micro-electro-mechanical system technology for measuring massflow. The main sensing structures are flat inductors that can concentrate electric field centralized to promotion sensitivity. The massflow mixed high magnetic permeabilitiy powders flow through the sensor that can vary sensing inductance and response time. The sensing system comprises flexible materials, MEMS structures, sensing circuits and a human-machine interface. A MEMS-based sensing mechanism is developed for measuring mass flow to increase sensitivity and reduce energy consumption. The flexible materials are used as electrical insulation layers to help effective measurement in harsh liquid environment.