Development A Massflow Measurement System Based on Flexible Electrical Sensor Array
碩士 === 逢甲大學 === 自動控制工程學系 === 103 === The research develops PDMS flexible substrate based electrical sensor array manufactured by the photolithography and life-off process of the micro-electro-mechanical system technology for measuring massflow. The main sensing structures are flat inductors that can...
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| Format: | Others |
| Language: | zh-TW |
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2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17425256656855026482 |