The Study in Optical Properties of ZrO2 and KPSFn202 Sputtering Films
碩士 === 正修科技大學 === 電機工程研究所 === 102 === The ZrO2 and K-PSFn202 thin films were prepared by RF sputtering method at various powers and atmospheres of Ar and N2,which used the ZrO2 and K-PSFn202 glass as target. These films were analyzed by XRD and UV-vis spectrometer to determine the film structure ,mo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20521568994953689558 |