A study on Properties of TCO Thin Films Applied for Solar Cells
博士 === 元智大學 === 光電工程學系 === 102 === Indium Tin Oxide (ITO) thin films were grown on soda-lime glass substrates by direct current (DC) reactive magnetron sputtering method. Optimizing the annealing temperature and oxygen/argon ratio can greatly improve the composition of the ITO film to improving its...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/96505227777598170672 |