Optimal Scheduling for the Automated Material Handling System in a Semiconductor Wafer Fabrication Plant
碩士 === 國立雲林科技大學 === 工業工程與管理系 === 102 === Due to the complexity of process and a large number of stochastic handling requirements, the semiconductor wafer fabrication process is always delivered by the AMHS (Automated Material Handling System, AMHS). However, during the handling process, wait for eac...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/23923170983844479046 |