THE REALIZATION OF AN OPTICAL FIBER SENSOR BASED ON SURFACE PLASMON RESONANCE FOR IN-SITU AND REAL-TIME THIN FILM THICKNESS MONITORING
碩士 === 大同大學 === 光電工程研究所 === 102 === In this thesis, an optical fiber sensor based on surface plasmon resonance (SPR) is designed to estimate the film thickness of nano thin film deposition for in-situ and real-time monitoring. SPR optical fiber sensor have the advantages of low cost, simple and rel...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/582563 |