Fabrication of field emission array by the selective growth of carbon nanocoils
碩士 === 大同大學 === 光電工程研究所 === 102 === This thesis has four parts. The first part is to use the DC sputtering to deposit the ITO-Fe catalytic film on Si substrate. And then we use thermal chemical vapor deposition to grow the carbon nanocoils by flowing the C2H2 and Ar in the furnace tube. We can chang...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5ggdp9 |