A study on high performance UV detector using Diamond-like Carbon films with various metal electrodes
碩士 === 國立臺北科技大學 === 機電整合研究所 === 102 === Diamond-like carbon (DLC) films are considered to be excellent materials due to their outstanding physical and chemical characteristics. In this study, unbalanced magnetron radio frequency sputtering system was employed to prepare DLC films at room temperature...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/sf9us2 |