Effect of Phosphorus Dose Loss on C-V Characteristics of Planar Junctionless Poly-Si Thin-Film Transistors

碩士 === 亞洲大學 === 光電與通訊學系 === 102 === In the high-tech industry, the device size continue to shrink, the traditional devices metal-oxide-semiconductor field effect transistor (MOSFET)structure is approaching to the physical limits, it make Nano device need to develop different structure and material a...

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Bibliographic Details
Main Authors: Jui-Chang Lin, 林瑞昌
Other Authors: Jung-Ruey Tsai
Format: Others
Language:en_US
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/44300477239201369382